The Shuttleworth Clean Passage system is a complete flexible manufacturing fab transport system that enables any point to any point routing of work-in-process (WIP) in flat panel display and semiconductor fabs. It is suitable for inter bay and intra bay transport and local buffering of cassettes and pods above the ceiling through use of a self-contained mini-environment.
The Clean Passage fab transport system consists of Slip-Trak® conveyors in a mini-environment suspended above the ceilings of both clean and dirty areas of the fab. Clean vertical conveyors are employed to deliver cassettes and pods to and receive them from cleanroom bays or tool clusters within the bays. The unique features of Shuttleworth Slip-Trak® conveyors enable random-access pod or cassette buffering directly on the conveyor surface above each bay or tool cluster, ensuring WIP is immediately available when tools are operational. The Clean Passage mini-environment is equipped with its own filters and is designed to connect directly to the fab HVAC system. It is cleanroom compatible to Class 1 in the product area depending on specific customer requirements.